04.03.05 Sputtertargets für die Flachglasbeschichtung
Sputtertargets für die Flachglasbeschichtung
Founded in 1991, FHR Anlagenbau GmbH provides customized vacuum coating equipment and sputter targets as well as coating and equipment services from a single expert source.
We support our customers in close contact starting from process development via R&D scale to mass production. Our portfolio combines technologies as sputtering, evaporation, PECVD and ALD with the tool types cluster, inline, roll-to-roll and box. Based in Germany, with tools installed worldwide in various branches such as semiconductor, MEMS, electronic, sensor, optic, display, photovoltaic and more industries, we are ready to support you wherever you want to go.